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Handbook of semiconductor manufactur...

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Doering, Robert, (1946-)

Handbook of semiconductor manufacturing technology

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of semiconductor manufacturing technologyedited by Robert Doering, Yoshio Nishi.
other author:	Doering, Robert,
Published:	Boca Raton :CRC Press,c2008.
Description:	1 online resource (1720 p.) :ill.
Subject:	SemiconductorsCongresses.Design and construction
Online resource:	Distributed by publisher. Purchase or institutional license may be required for access.
ISBN:	9781420017663 (e-book : PDF)

Handbook of semiconductor manufacturing technology
Handbook of semiconductor manufacturing technology[electronic resource] /edited by Robert Doering, Yoshio Nishi. - 2nd ed. - Boca Raton :CRC Press,c2008. - 1 online resource (1720 p.) :ill.

Includes bibliographical references and index.

Mode of access: World Wide Web.

ISBN: 9781420017663 (e-book : PDF)Subjects--Topical Terms:

438657
Semiconductors
--Design and construction--Congresses.Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7871.85 / .H3335 2008

Dewey Class. No.: 621.38152 / H236

Handbook of semiconductor manufacturing technology
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003 FlBoTFG
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006 m d
007 cr cn|||||||||
008 121106s2008 flua sbf 001 0 eng d
020 $a 9781420017663 (e-book : PDF)
020 $a 9781574446753
035 $a CRC0DKE4126PDF
040 $a FlBoTFG $c FlBoTFG
050 4 $a TK7871.85 $b .H3335 2008
082 4 $a 621.38152 $b H236
245 0 0 $a Handbook of semiconductor manufacturing technology $h [electronic resource] / $c edited by Robert Doering, Yoshio Nishi.
250 $a 2nd ed.
260 $a Boca Raton : $b CRC Press, $c c2008.
300 $a 1 online resource (1720 p.) : $b ill.
504 $a Includes bibliographical references and index.
530 $a Also available in print edition. $b CRC Press (http://www.crcpress.com)
538 $a Mode of access: World Wide Web.
650 0 $a Semiconductors $x Design and construction $v Congresses. $3 438657
650 0 $a Semiconductor industry $v Handbooks, manuals, etc. $3 438973
655 7 $a Electronic books. $2 local. $3 214472
700 1 $a Doering, Robert, $d 1946- $3 257690
700 1 $a Nishi, Yoshio, $d 1940- $3 257689
856 4 0 $u http://marc.crcnetbase.com/isbn/9781420017663 $q application/PDF $z Distributed by publisher. Purchase or institutional license may be required for access.

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EB TK7871.85 H3335 2008 c2008

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http://marc.crcnetbase.com/isbn/9781420017663

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