國立高雄大學圖資館 |

Handbook of thin film materials

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of thin film materialsedited by Hari Singh Nalwa.
other author:	Nalwa, Hari Singh,
Published:	San Diego :Academic Press,c2002.
Description:	1 online resource (5 v.) :ill.
Subject:	Thin filmsCongresses.
Online resource:	http://www.sciencedirect.com/science/book/9780125129084
ISBN:	9780125129084

Handbook of thin film materials
Handbook of thin film materials[electronic resource] /edited by Hari Singh Nalwa. - San Diego :Academic Press,c2002. - 1 online resource (5 v.) :ill.

Includes bibliographical references and indexes.

Volume 1 Deposition and Processing -- 1 Methods of deposition of hydrogenated amorphous silicon for device applications -- 2 Atomic Layer Deposition -- 3 Laser Applications in Transparent Conducting Oxide Thin Film Processing -- 4 Cold Plasma Processing in Surface Science and Technology -- 5 Electrochemical Formation of Thin Films of Binary III-V Compounds -- 6 Nucleation, Growth and Crystallization of Thin Films -- 7 Ion Implant Doping and Isolation of GaN and Related Materials -- 8 Plasma Etching of GaN and Related Materials -- 9 Residual Stresses in Physically Vapor Deposited Thin Films -- 10 Langmuir-Blodgett Films of Biological Molecules -- 11 Structure Formation During Electrocrystallization of Metal Films -- 12 Epitaxial Thin Films of Intermetallic Compounds -- 13 Pulsed Laser Deposition of Thin Films: Expectations and Reality -- 14 b"-Alumina Single-Crystal Films -- Volume 2 Characterization and Spectroscopy -- 1 Classification of Cluster Morphologies -- 2 The Band Structure and Orientations of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies -- 3 Superhard Thin Film Coatings in C-B-N Systems: Growth and Characterization -- 4 ATR Spectroscopy of Thin Films -- 5 Ion Beam Characterization in Superlattices -- 6 In-situ Real Time Spectroscopic Ellipsometry Studies: Carbon-based Materials and Metallic TiNx Thin Films Growth -- 7 In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric and Metal Thin Films -- 8 Photocurrent Spectroscopy of Thin Passive Films -- 9 Electron Energy Loss Spectroscopy for Surface Study -- 10 Theory of Low-energy Electron Diffraction and Photoelectron Spectroscopy from Ultra-thin Films -- 11 In situ Synchrotron Structural Studies of the Growth of Oxides and Metals -- 12 Operator Formalism in Polarization Nonlinear Optics and Spectroscopy of Polarization Inhomogeneous Media -- 13 Secondary Ion Mass Spectrometry (SIMS) and its Application to Thin Films Characterization -- 14 A Solid State Approach to Langmuir Monolayers, Their Phases, Phase Transitions and Design -- 15 Solid State NMR of Biomolecules -- Volume 3 Ferroelectric and Dielectric Thin Films -- 1 Electrical Properties of High Dielectric Constant and Ferroelectric Thin Films for Very Large Scale Integration (VLSI) Integrated Circuits -- 2 High Permittivity (Ba, Sr)TiO3 Thin Films -- 3 Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices -- 4 Piezoelectric Thin Films: Processing and Properties -- 5 Fabrication and Characterization of Ferroelectric Oxide Thin Films -- 6 Ferroelectric Thin Films of Modified Lead Titanate -- 7 Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems -- 8 Polarization Switching of Ferroelectric Crystals -- 9 High Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications -- 10 Twinning in Ferroelectric Thin Films: Theory and Structural Analysis -- 11 Ferroelectric Polymers Langmuir-Blodgett Films -- 12 Optical Properties of Dielectric and Semiconductor Thin Films -- Volume 4 Semiconductor and Superconducting Thin Films -- 1 Electrochemical Passivation of Si and SiGe Surfaces -- 2 Epitaxial Growth and Structure of III-V Nitride Thin Films -- 3 Optical Properties of Highly Excited (Al, In) GaN Epilayers and Heterostructures -- 4 Electrical Conduction Properties of Thin Films of Cadmium Compounds -- 5 Carbon Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001) -- 6 Low Frequency Noise Spectroscopy for Characterization of Polycrystalline Semiconducting Thin Films and Polysilicon Thin Film Transistors -- 7 Germanium Thin Films on Silicon for Detection of Near-Infrared Light -- 8 Physical Properties of Amorphous Gallium Arsenide -- 9 Amorphous Carbon Thin Films -- 10 High-Tc Superconducting Thin Films -- 11 Electronic and Optical Properties of Strained Semiconductor Films of Group V and III-V Materials -- 12 Growth Structure and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films -- 13 Conductive Metal Oxide Thin Films -- Volume 5 Magnetic Thin Films -- 1 Nanoimprinting Techniques -- 2 The Energy Gap of Clusters, Nanoparticles and Quantum Dots -- 3 Electronic States In GaAs-AlAs Short-period Superlattices: Energy Levels and Symmetry -- -- 4 Spin Waves in Thin Films, Multi-Layers, and Superlattices -- 5 Quantum Well Interference in Double Quantum Wells -- 6 Electro-optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials -- 7 Magnetism of Nanoscale Composite Films -- 8 Thin Magnetic Films -- 9 Magnetotransport Effects in Semiconductors -- 10 Thin Films for High Density Magnetic Recording -- 11 Nuclear Resonance in Magnetic Thin Films and Multilayers -- 12 Magnetic Characterization of Superconducting Thin Films.

This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

ISBN: 9780125129084

Source: 89167:89167Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

439264
Thin films
--Congresses.Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TA418.9.T45 / H35 2002eb

Dewey Class. No.: 621.3815/2

Handbook of thin film materials
LDR:07679cmm 2200313Ia 4500 001 354314
005 20120813083452.0
006 m d
007 cr cn|||||||||
008 130104s2002 caua obf 001 0 eng d
020 $a 9780125129084
020 $a 0125129084
029 1 $a NZ1 $b 12433406
029 1 $a DEBBG $b BV039832594
035 $a ocn162575792
037 $a 89167:89167 $b Elsevier Science & Technology $n http://www.sciencedirect.com
040 $a OPELS $b eng $c OPELS $d OCLCG $d OCLCQ
049 $a NTYA
050 4 $a TA418.9.T45 $b H35 2002eb
082 0 4 $a 621.3815/2 $2 22
245 0 0 $a Handbook of thin film materials $h [electronic resource] / $c edited by Hari Singh Nalwa.
260 $a San Diego : $b Academic Press, $c c2002.
300 $a 1 online resource (5 v.) : $b ill.
504 $a Includes bibliographical references and indexes.
505 0 $a Volume 1 Deposition and Processing -- 1 Methods of deposition of hydrogenated amorphous silicon for device applications -- 2 Atomic Layer Deposition -- 3 Laser Applications in Transparent Conducting Oxide Thin Film Processing -- 4 Cold Plasma Processing in Surface Science and Technology -- 5 Electrochemical Formation of Thin Films of Binary III-V Compounds -- 6 Nucleation, Growth and Crystallization of Thin Films -- 7 Ion Implant Doping and Isolation of GaN and Related Materials -- 8 Plasma Etching of GaN and Related Materials -- 9 Residual Stresses in Physically Vapor Deposited Thin Films -- 10 Langmuir-Blodgett Films of Biological Molecules -- 11 Structure Formation During Electrocrystallization of Metal Films -- 12 Epitaxial Thin Films of Intermetallic Compounds -- 13 Pulsed Laser Deposition of Thin Films: Expectations and Reality -- 14 b"-Alumina Single-Crystal Films -- Volume 2 Characterization and Spectroscopy -- 1 Classification of Cluster Morphologies -- 2 The Band Structure and Orientations of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies -- 3 Superhard Thin Film Coatings in C-B-N Systems: Growth and Characterization -- 4 ATR Spectroscopy of Thin Films -- 5 Ion Beam Characterization in Superlattices -- 6 In-situ Real Time Spectroscopic Ellipsometry Studies: Carbon-based Materials and Metallic TiNx Thin Films Growth -- 7 In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric and Metal Thin Films -- 8 Photocurrent Spectroscopy of Thin Passive Films -- 9 Electron Energy Loss Spectroscopy for Surface Study -- 10 Theory of Low-energy Electron Diffraction and Photoelectron Spectroscopy from Ultra-thin Films -- 11 In situ Synchrotron Structural Studies of the Growth of Oxides and Metals -- 12 Operator Formalism in Polarization Nonlinear Optics and Spectroscopy of Polarization Inhomogeneous Media -- 13 Secondary Ion Mass Spectrometry (SIMS) and its Application to Thin Films Characterization -- 14 A Solid State Approach to Langmuir Monolayers, Their Phases, Phase Transitions and Design -- 15 Solid State NMR of Biomolecules -- Volume 3 Ferroelectric and Dielectric Thin Films -- 1 Electrical Properties of High Dielectric Constant and Ferroelectric Thin Films for Very Large Scale Integration (VLSI) Integrated Circuits -- 2 High Permittivity (Ba, Sr)TiO3 Thin Films -- 3 Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices -- 4 Piezoelectric Thin Films: Processing and Properties -- 5 Fabrication and Characterization of Ferroelectric Oxide Thin Films -- 6 Ferroelectric Thin Films of Modified Lead Titanate -- 7 Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems -- 8 Polarization Switching of Ferroelectric Crystals -- 9 High Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications -- 10 Twinning in Ferroelectric Thin Films: Theory and Structural Analysis -- 11 Ferroelectric Polymers Langmuir-Blodgett Films -- 12 Optical Properties of Dielectric and Semiconductor Thin Films -- Volume 4 Semiconductor and Superconducting Thin Films -- 1 Electrochemical Passivation of Si and SiGe Surfaces -- 2 Epitaxial Growth and Structure of III-V Nitride Thin Films -- 3 Optical Properties of Highly Excited (Al, In) GaN Epilayers and Heterostructures -- 4 Electrical Conduction Properties of Thin Films of Cadmium Compounds -- 5 Carbon Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001) -- 6 Low Frequency Noise Spectroscopy for Characterization of Polycrystalline Semiconducting Thin Films and Polysilicon Thin Film Transistors -- 7 Germanium Thin Films on Silicon for Detection of Near-Infrared Light -- 8 Physical Properties of Amorphous Gallium Arsenide -- 9 Amorphous Carbon Thin Films -- 10 High-Tc Superconducting Thin Films -- 11 Electronic and Optical Properties of Strained Semiconductor Films of Group V and III-V Materials -- 12 Growth Structure and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films -- 13 Conductive Metal Oxide Thin Films -- Volume 5 Magnetic Thin Films -- 1 Nanoimprinting Techniques -- 2 The Energy Gap of Clusters, Nanoparticles and Quantum Dots -- 3 Electronic States In GaAs-AlAs Short-period Superlattices: Energy Levels and Symmetry -- -- 4 Spin Waves in Thin Films, Multi-Layers, and Superlattices -- 5 Quantum Well Interference in Double Quantum Wells -- 6 Electro-optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials -- 7 Magnetism of Nanoscale Composite Films -- 8 Thin Magnetic Films -- 9 Magnetotransport Effects in Semiconductors -- 10 Thin Films for High Density Magnetic Recording -- 11 Nuclear Resonance in Magnetic Thin Films and Multilayers -- 12 Magnetic Characterization of Superconducting Thin Films.
505 0 $a v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films.
520 $a This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.
588 $a Description based on print version record.
650 0 $a Thin films $v Congresses. $3 439264
655 4 $a Electronic books. $2 local. $3 214472
700 1 $a Nalwa, Hari Singh, $d 1954- $3 215129
776 0 8 $i Print version: $t Handbook of thin film materials. $d San Diego : Academic Press, c2002 $z 0125129084 $z 9780125129084 $w (DLC) 2001090614 $w (OCoLC)48207885
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780125129084