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Ceramic thick films for MEMS and mic...

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Dorey, Robert A.

Ceramic thick films for MEMS and microdevices

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Ceramic thick films for MEMS and microdevicesRobert A. Dorey.
作者:	Dorey, Robert A.
出版者:	Waltham, [MA] :William Andrew,2012.
面頁冊數:	xviii, 191 p. :ill. ;24 cm.
標題:	Thick-film circuitsDesign and construction.
電子資源:	http://www.sciencedirect.com/science/book/9781437778175
ISBN:	9781437778175 (electronic bk.)

Ceramic thick films for MEMS and microdevices
Dorey, Robert A.

Ceramic thick films for MEMS and microdevices[electronic resource] /Robert A. Dorey. - Waltham, [MA] :William Andrew,2012. - xviii, 191 p. :ill. ;24 cm. - Micro and nano technologies series. - Micro & nano technologies..

Includes bibliographical references (p. 183-185) and index.

ISBN: 9781437778175 (electronic bk.)

LCCN: 2011276747Subjects--Topical Terms:

646804
Thick-film circuits
--Design and construction.

LC Class. No.: TK7871.15.F5 / D67 2012

Dewey Class. No.: 621.3815

Ceramic thick films for MEMS and microdevices
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