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Poly-SiGe for MEMS-above-CMOS sensors

De Meyer, Kristin.

Poly-SiGe for MEMS-above-CMOS sensors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Poly-SiGe for MEMS-above-CMOS sensorsby Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
Author:	Gonzalez Ruiz, Pilar.
other author:	De Meyer, Kristin.
Published:	Dordrecht :Springer Netherlands :2014.
Description:	xvi, 199 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems.
Online resource:	http://dx.doi.org/10.1007/978-94-007-6799-7
ISBN:	9789400767997 (electronic bk.)

Poly-SiGe for MEMS-above-CMOS sensors
Gonzalez Ruiz, Pilar.

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw. - Dordrecht :Springer Netherlands :2014. - xvi, 199 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v.441437-0387 ;. - Springer series in advanced microelectronics ;3..

ISBN: 9789400767997 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .G66 2014

Dewey Class. No.: 621.381

Poly-SiGe for MEMS-above-CMOS sensors
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