國立高雄大學圖資館 |

語系: 繁體中文

說明(常見問題)

圖資館首頁

登入

回首頁

切換: 標籤 | MARC模式 | ISBD

Poly-SiGe for MEMS-above-CMOS sensors

De Meyer, Kristin.

Poly-SiGe for MEMS-above-CMOS sensors

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Poly-SiGe for MEMS-above-CMOS sensorsby Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
作者:	Gonzalez Ruiz, Pilar.
其他作者:	De Meyer, Kristin.
出版者:	Dordrecht :Springer Netherlands :2014.
面頁冊數:	xvi, 199 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
電子資源:	http://dx.doi.org/10.1007/978-94-007-6799-7
ISBN:	9789400767997 (electronic bk.)

Poly-SiGe for MEMS-above-CMOS sensors
Gonzalez Ruiz, Pilar.

Poly-SiGe for MEMS-above-CMOS sensors[electronic resource] /by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw. - Dordrecht :Springer Netherlands :2014. - xvi, 199 p. :ill., digital ;24 cm. - Springer series in advanced microelectronics,v.441437-0387 ;. - Springer series in advanced microelectronics ;3..

ISBN: 9789400767997 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .G66 2014

Dewey Class. No.: 621.381

Poly-SiGe for MEMS-above-CMOS sensors
LDR:00890nmm a2200265 a 4500 001 431206
003 DE-He213
005 20140616162346.0
006 m d
007 cr nn 008maaau
008 141114s2014 ne s 0 eng d
020 $a 9789400767997 (electronic bk.)
020 $a 9789400767980 (paper)
035 $a 978-94-007-6799-7
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7875 $b .G66 2014
082 0 4 $a 621.381 $2 23
090 $a TK7875 $b .G643 2014
100 1 $a Gonzalez Ruiz, Pilar. $3 674595
245 1 0 $a Poly-SiGe for MEMS-above-CMOS sensors $h [electronic resource] / $c by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.
260 $a Dordrecht : $b Springer Netherlands : $b Imprint: Springer, $c 2014.
300 $a xvi, 199 p. : $b ill., digital ; $c 24 cm.
490 1 $a Springer series in advanced microelectronics, $x 1437-0387 ; $v v.44
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Metal oxide semiconductors, Complementary. $3 184467
650 0 $a Polycrystals. $3 674598
650 1 4 $a Physics. $3 179414
650 2 4 $a Electronic Circuits and Devices. $3 495609
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Optical and Electronic Materials. $3 274099
650 2 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Characterization and Evaluation of Materials. $3 273978
700 1 $a De Meyer, Kristin. $3 674596
700 1 $a Witvrouw, Ann. $3 674597
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
830 0 $a Springer series in advanced microelectronics ; $v 3. $3 444554
856 4 0 $u http://dx.doi.org/10.1007/978-94-007-6799-7
950 $a Engineering (Springer-11647)