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Atomic layer deposition for semicond...

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Seong Hwang, Cheol.

Atomic layer deposition for semiconductors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Atomic layer deposition for semiconductorsedited by Cheol Seong Hwang.
other author:	Seong Hwang, Cheol.
Published:	Boston, MA :Springer US :2014.
Description:	x, 263 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	SemiconductorsSurfaces.
Online resource:	http://dx.doi.org/10.1007/978-1-4614-8054-9
ISBN:	9781461480549 (electronic bk.)

Atomic layer deposition for semiconductors
Atomic layer deposition for semiconductors[electronic resource] /edited by Cheol Seong Hwang. - Boston, MA :Springer US :2014. - x, 263 p. :ill., digital ;24 cm.

ISBN: 9781461480549 (electronic bk.)Subjects--Topical Terms:

229800
Semiconductors
--Surfaces.

Dewey Class. No.: 621.38152

Atomic layer deposition for semiconductors
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020 $a 9781461480549 (electronic bk.)
020 $a 9781461480532 (paper)
035 $a 978-1-4614-8054-9
040 $a GP $c GP
041 0 $a eng
082 0 4 $a 621.38152 $2 23
090 $a TK7871.85 $b .A881 2014
245 0 0 $a Atomic layer deposition for semiconductors $h [electronic resource] / $c edited by Cheol Seong Hwang.
260 $a Boston, MA : $b Springer US : $b Imprint: Springer, $c 2014.
300 $a x, 263 p. : $b ill., digital ; $c 24 cm.
650 0 $a Semiconductors $x Surfaces. $3 229800
650 1 4 $a Chemistry. $3 188628
650 2 4 $a Electrochemistry. $3 192934
650 2 4 $a Semiconductors. $3 182134
650 2 4 $a Memory Structures. $3 274440
650 2 4 $a Energy Technology. $3 338873
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
700 1 $a Seong Hwang, Cheol. $3 675865
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-1-4614-8054-9
950 $a Chemistry and Materials Science (Springer-11644)

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000000095417

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EB TK787185 A881 2014

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1 records • Pages 1 •
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http://dx.doi.org/10.1007/978-1-4614-8054-9

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