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PVD for microelectronicssputter depo...

Powell, Ronald A.

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /

Record Type:	Electronic resources : Monograph/item
Title/Author:	PVD for microelectronicsRonald A. Powell, Stephen M. Rossnagel.
Reminder of title:	sputter deposition applied to semiconductor manufacturing /
Author:	Powell, Ronald A.
other author:	Rossnagel, Stephen M.
Published:	San Diego :Academic Press,c1999.
Description:	xiii, 419 p. :ill. ;24 cm.
Subject:	Thin film devicesDesign and construction.
Online resource:	http://www.sciencedirect.com/science/book/9780125330268
ISBN:	9780125330268 (electronic bk.)

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /
Powell, Ronald A.

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /[electronic resource] :Ronald A. Powell, Stephen M. Rossnagel. - San Diego :Academic Press,c1999. - xiii, 419 p. :ill. ;24 cm. - Thin films ;v. 26 . - Thin films (San Diego, Calif.) ;v. 28..

Includes bibliographical references and indexes.

ISBN: 9780125330268 (electronic bk.) Subjects--Topical Terms:

203677
Thin film devices
--Design and construction.

LC Class. No.: QC176.A1 / P53 v.26

Dewey Class. No.: 621.3815/2

PVD for microelectronicssputter deposition applied to semiconductor manufacturing /
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020 $a 9780125330268 (electronic bk.)
020 $a 9780125330268
035 $a 13003241
040 $a DLC $c DLC $d C#P $d UBA $d BGU
041 0 $a eng
050 4 $a QC176.A1 $b P53 v.26
082 0 0 $a 621.3815/2 $2 21
100 1 $a Powell, Ronald A. $3 665373
245 1 0 $a PVD for microelectronics $h [electronic resource] : $b sputter deposition applied to semiconductor manufacturing / $c Ronald A. Powell, Stephen M. Rossnagel.
260 $a San Diego : $b Academic Press, $c c1999.
300 $a xiii, 419 p. : $b ill. ; $c 24 cm.
490 1 $a Thin films ; $v v. 26
504 $a Includes bibliographical references and indexes.
650 0 $a Thin film devices $x Design and construction. $3 203677
650 0 $a Vapor-plating. $3 247876
650 0 $a Thin films. $3 203678
700 1 $a Rossnagel, Stephen M. $3 664409
830 0 $a Thin films (San Diego, Calif.) ; $v v. 28. $3 451884
856 4 0 $u http://www.sciencedirect.com/science/book/9780125330268