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Micro mechanical systemsprinciples a...

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Fukuda, T. (1948-)

Micro mechanical systemsprinciples and technology /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micro mechanical systemsedited by T. Fukuda and W. Menz.
Reminder of title:	principles and technology /
other author:	Fukuda, T.
Published:	Amsterdam ;Elsevier,1998.
Description:	viii, 268 p. :ill. ;25 cm.
Subject:	Microelectromechanical systemsCongresses.
Online resource:	http://www.sciencedirect.com/science/book/9780444823632
ISBN:	9780444823632 (electronic bk.)

Micro mechanical systemsprinciples and technology /
Micro mechanical systemsprinciples and technology /[electronic resource] :edited by T. Fukuda and W. Menz. - Amsterdam ;Elsevier,1998. - viii, 268 p. :ill. ;25 cm. - Handbook of sensors and actuators ;v. 6.

Includes bibliographical references.

ISBN: 9780444823632 (electronic bk.)

LCCN: 98020529 Subjects--Topical Terms:

445812
Microelectromechanical systems
--Congresses.

LC Class. No.: TJ163 / .M48 1998

Dewey Class. No.: 621

Micro mechanical systemsprinciples and technology /
LDR:00757cmm a2200217 a 45 001 449875
005 20130415105836.0
008 150513s1998 ne a sb 000 0 eng
010 $a 98020529
020 $a 9780444823632 (electronic bk.)
020 $a 9780444823632
035 $a 13002376
040 $a DLC $c DLC $d DLC
041 0 $a eng
050 0 0 $a TJ163 $b .M48 1998
082 0 0 $a 621 $2 21
245 0 0 $a Micro mechanical systems $h [electronic resource] : $b principles and technology / $c edited by T. Fukuda and W. Menz.
260 $a Amsterdam ; $a New York : $b Elsevier, $c 1998.
300 $a viii, 268 p. : $b ill. ; $c 25 cm.
490 0 $a Handbook of sensors and actuators ; $v v. 6
504 $a Includes bibliographical references.
650 0 $a Microelectromechanical systems $v Congresses. $3 445812
700 1 $a Fukuda, T. $q (Toshio), $d 1948- $3 650253
700 1 $a Menz, W. $q (Wolfgang) $3 445821
856 4 0 $u http://www.sciencedirect.com/science/book/9780444823632

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EB TJ163 M48 1998

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