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Micro and nano fabricationtools and ...

Gatzen, Hans H.

Micro and nano fabricationtools and processes /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micro and nano fabricationby Hans H. Gatzen, Volker Saile, Jurg Leuthold.
Reminder of title:	tools and processes /
Author:	Gatzen, Hans H.
other author:	Saile, Volker.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg :2015.
Description:	xxvi, 519 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems.
Online resource:	http://dx.doi.org/10.1007/978-3-662-44395-8
ISBN:	9783662443958 (electronic bk.)

Micro and nano fabricationtools and processes /
Gatzen, Hans H.

Micro and nano fabricationtools and processes /[electronic resource] :by Hans H. Gatzen, Volker Saile, Jurg Leuthold. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxvi, 519 p. :ill., digital ;24 cm.

Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

ISBN: 9783662443958 (electronic bk.)

Standard No.: 10.1007/978-3-662-44395-8doiSubjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Micro and nano fabricationtools and processes /
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245 1 0 $a Micro and nano fabrication $h [electronic resource] : $b tools and processes / $c by Hans H. Gatzen, Volker Saile, Jurg Leuthold.
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505 0 $a Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
520 $a For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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