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Nanofabrication handbook

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Cabrini, Stefano.

Nanofabrication handbook

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanofabrication handbookedited by Stefano Cabrini, Satoshi Kawata.
other author:	Cabrini, Stefano.
Published:	Boca Raton, FL :CRC Press,c2012.
Description:	1 online resource (xv, 518 p.) :ill.
Subject:	Nanostructured materialsCongresses.
Online resource:	http://www.crcnetbase.com/isbn/9781420090536
ISBN:	9781420090536$q(electronic bk.)

Nanofabrication handbook
Nanofabrication handbook[electronic resource] /edited by Stefano Cabrini, Satoshi Kawata. - Boca Raton, FL :CRC Press,c2012. - 1 online resource (xv, 518 p.) :ill.

Includes bibliographical references and index.

pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.

ISBN: 9781420090536$q(electronic bk.)Subjects--Topical Terms:

438612
Nanostructured materials
--Congresses.Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TA418.9.N35 / N2523 2012eb

Dewey Class. No.: 620.1/15

Nanofabrication handbook
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003 OCoLC
005 20151105035018.0
006 m o d
007 cr cnu---unuuu
008 151126s2012 flua obf 001 0 eng d
020 $a 9781420090536$q(electronic bk.)
020 $a 1420090534$q(electronic bk.)
020 $z 9781420090529
020 $z 1420090526
020 $a 1280121521
020 $a 9781280121524
035 $a (OCoLC)781629152 $z (OCoLC)785337382 $z (OCoLC)787846554 $z (OCoLC)817067651 $z (OCoLC)824114149 $z (OCoLC)880559326
035 $a ocn781629152
040 $a N $b eng $c N $d EBLCP $d YDXCP $d WAU $d UAB $d OCLCQ $d OCLCF $d BWS $d OCLCO $d OCLCQ $d CRCPR $d OCLCQ $d DEBSZ $d IDEBK $d E7B $d CDX $d OCL
050 4 $a TA418.9.N35 $b N2523 2012eb
082 0 4 $a 620.1/15 $2 23
245 0 0 $a Nanofabrication handbook $h [electronic resource] / $c edited by Stefano Cabrini, Satoshi Kawata.
260 $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 1 online resource (xv, 518 p.) : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
588 0 $a Print version record.
650 0 $a Nanostructured materials $v Congresses. $3 438612
650 0 $a Nanostructures $v Congresses. $3 438624
655 0 $a Electronic books. $2 local. $3 214472
700 1 $a Cabrini, Stefano. $3 716917
700 1 $a Kawata, Satoshi, $d 1966- $3 226339
856 4 0 $u http://www.crcnetbase.com/isbn/9781420090536

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000000113141

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EB TA418.9.N35 N186 c2012

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http://www.crcnetbase.com/isbn/9781420090536

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