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Atomic layer depositionprinciples, c...

Kääriäinen, Tommi.

Atomic layer depositionprinciples, characteristics, and nanotechnology applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Atomic layer depositionTommi Kääriäinen ... [et al.].
Reminder of title:	principles, characteristics, and nanotechnology applications /
Author:	Kääriäinen, Tommi.
Published:	Salem, Massachusetts :Scrivener Publishing ;2013.
Description:	1 online resource (xv, 256 p.)
Subject:	Chemical vapor deposition.
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9781118747407
ISBN:	9781118747407 (electronic bk.)

Atomic layer depositionprinciples, characteristics, and nanotechnology applications /
Kääriäinen, Tommi.

Atomic layer depositionprinciples, characteristics, and nanotechnology applications /[electronic resource] :Tommi Kääriäinen ... [et al.]. - 2nd ed. - Salem, Massachusetts :Scrivener Publishing ;2013. - 1 online resource (xv, 256 p.)

Includes bibliographical references and index.

ISBN: 9781118747407 (electronic bk.)

LCCN: 2013016681Subjects--Topical Terms:

184282
Chemical vapor deposition.

LC Class. No.: TS695

Dewey Class. No.: 620.5

Atomic layer depositionprinciples, characteristics, and nanotechnology applications /
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010 $a 2013016681
020 $a 9781118747407 (electronic bk.)
020 $a 1118747402 (electronic bk.)
020 $a 9781118747421 (electronic bk.)
020 $a 1118747429 (electronic bk.)
020 $z 9781118747384
020 $z 1118747380
020 $z 9781118747346
020 $z 1118747348
020 $z 9781118062777 (cloth : alk. paper)
035 $a (OCoLC)841199237
035 $a ocn841199237
040 $a DLC $b eng $c DLC $d OCLCO $d OCLCQ $d N $d DG1 $d IDEBK $d CUS $d E7B
050 1 0 $a TS695
082 0 0 $a 620.5 $2 23
100 1 $a Kääriäinen, Tommi. $3 722297
245 1 0 $a Atomic layer deposition $h [electronic resource] : $b principles, characteristics, and nanotechnology applications / $c Tommi Kääriäinen ... [et al.].
250 $a 2nd ed.
260 $a Salem, Massachusetts : $b Scrivener Publishing ; $a Hoboken, New Jersey : $b Wiley, $c 2013.
300 $a 1 online resource (xv, 256 p.)
504 $a Includes bibliographical references and index.
588 $a Description based on online resource; title from PDF title page (Wiley, viewed June 19, 2013).
650 0 $a Chemical vapor deposition. $3 184282
650 0 $a Epitaxy. $3 251599
650 0 $a Microelectronics. $3 182484
650 0 $a Nanotechnology. $3 193873
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9781118747407