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Introduction to microsystem design

Schomburg, Werner Karl.

Introduction to microsystem design

Record Type:	Electronic resources : Monograph/item
Title/Author:	Introduction to microsystem designby Werner Karl Schomburg.
Author:	Schomburg, Werner Karl.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg :2015.
Description:	xxiv, 374 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systemsDesign and construction.
Online resource:	http://dx.doi.org/10.1007/978-3-662-47023-7
ISBN:	9783662470237 (electronic bk.)

Introduction to microsystem design
Schomburg, Werner Karl.

Introduction to microsystem design[electronic resource] /by Werner Karl Schomburg. - 2nd ed. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxiv, 374 p. :ill., digital ;24 cm. - RWTHedition,1865-0899. - RWTHedition..

Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

ISBN: 9783662470237 (electronic bk.)

Standard No.: 10.1007/978-3-662-47023-7doiSubjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Introduction to microsystem design
LDR:02091nmm a2200349 a 4500 001 471443
003 DE-He213
005 20160121143101.0
006 m d
007 cr nn 008maaau
008 160223s2015 gw s 0 eng d
020 $a 9783662470237 (electronic bk.)
020 $a 9783662470220 (paper)
024 7 $a 10.1007/978-3-662-47023-7 $2 doi
035 $a 978-3-662-47023-7
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7875
072 7 $a TJF $2 bicssc
072 7 $a TEC008000 $2 bisacsh
072 7 $a TEC008070 $2 bisacsh
082 0 4 $a 621.381 $2 23
090 $a TK7875 $b .S369 2015
100 1 $a Schomburg, Werner Karl. $3 514360
245 1 0 $a Introduction to microsystem design $h [electronic resource] / $c by Werner Karl Schomburg.
250 $a 2nd ed.
260 $a Berlin, Heidelberg : $b Springer Berlin Heidelberg : $b Imprint: Springer, $c 2015.
300 $a xxiv, 374 p. : $b ill., digital ; $c 24 cm.
490 1 $a RWTHedition, $x 1865-0899
505 0 $a Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
520 $a This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.
650 0 $a Microelectromechanical systems $x Design and construction. $3 206811
650 1 4 $a Engineering. $3 210888
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Nanotechnology and Microengineering. $3 348421
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
830 0 $a RWTHedition. $3 726657
856 4 0 $u http://dx.doi.org/10.1007/978-3-662-47023-7
950 $a Engineering (Springer-11647)