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Nanopositioning technologiesfundamen...

Liu, Xinyu.

Nanopositioning technologiesfundamentals and applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanopositioning technologiesedited by Changhai Ru, Xinyu Liu, Yu Sun.
Reminder of title:	fundamentals and applications /
other author:	Ru, Changhai.
Published:	Cham :Springer International Publishing :2016.
Description:	vi, 409 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Nanoelectromechanical systems.
Online resource:	http://dx.doi.org/10.1007/978-3-319-23853-1
ISBN:	9783319238531$q(electronic bk.)

Nanopositioning technologiesfundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531$q(electronic bk.)

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

321655
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

Nanopositioning technologiesfundamentals and applications /
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245 0 0 $a Nanopositioning technologies $h [electronic resource] : $b fundamentals and applications / $c edited by Changhai Ru, Xinyu Liu, Yu Sun.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2016.
300 $a vi, 409 p. : $b ill., digital ; $c 24 cm.
505 0 $a 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650 0 $a Nanoelectromechanical systems. $3 321655
650 1 4 $a Engineering. $3 210888
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650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Control, Robotics, Mechatronics. $3 339147
650 2 4 $a Engineering Design. $3 273752
700 1 $a Ru, Changhai. $3 739036
700 1 $a Liu, Xinyu. $3 739037
700 1 $a Sun, Yu. $3 739038
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856 4 0 $u http://dx.doi.org/10.1007/978-3-319-23853-1
950 $a Engineering (Springer-11647)