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Micro/nano integrated fabrication technology and its applications in microenergy harvesting

Record Type:	Electronic resources : Monograph/item
Title/Author:	Micro/nano integrated fabrication technology and its applications in microenergy harvestingby Xiao-Sheng Zhang.
Author:	Zhang, Xiao-Sheng.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg :2016.
Description:	xx, 122 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Nanotechnology.
Online resource:	http://dx.doi.org/10.1007/978-3-662-48816-4
ISBN:	9783662488164$q(electronic bk.)

Micro/nano integrated fabrication technology and its applications in microenergy harvesting
Zhang, Xiao-Sheng.

Micro/nano integrated fabrication technology and its applications in microenergy harvesting[electronic resource] /by Xiao-Sheng Zhang. - Berlin, Heidelberg :Springer Berlin Heidelberg :2016. - xx, 122 p. :ill., digital ;24 cm. - Springer theses,2190-5053. - Springer theses..

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

ISBN: 9783662488164$q(electronic bk.)

Standard No.: 10.1007/978-3-662-48816-4doiSubjects--Topical Terms:

193873
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

Micro/nano integrated fabrication technology and its applications in microenergy harvesting
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