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Handbook of silicon based MEMS mater...

Tilli, Markku.

Handbook of silicon based MEMS materials and technologies

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of silicon based MEMS materials and technologiesedited by Markku Tilli ... [et al.]
other author:	Tilli, Markku.
Published:	London, UK :William Andrew,2015.
Description:	1 online resource :ill.
Subject:	Microelectromechanical systems.
Online resource:	click for full text
ISBN:	9780323312233 (electronic bk.)

Handbook of silicon based MEMS materials and technologies
Handbook of silicon based MEMS materials and technologies[electronic resource] /edited by Markku Tilli ... [et al.] - 2nd ed. - London, UK :William Andrew,2015. - 1 online resource :ill. - Micro & nano technologies. - Micro & nano technologies..

Includes bibliographical references and index.

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.

ISBN: 9780323312233 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875

Dewey Class. No.: 621.3815/2

Handbook of silicon based MEMS materials and technologies
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245 0 0 $a Handbook of silicon based MEMS materials and technologies $h [electronic resource] / $c edited by Markku Tilli ... [et al.]
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520 $a The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
650 0 $a Microelectromechanical systems. $3 189825
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650 0 $a Silicon $x Electric properties. $3 225186
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700 1 $a Tilli, Markku. $3 752116
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