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Nanolithographythe art of fabricatin...

Feldman, Martin,

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanolithographyedited by Martin Feldman.
Reminder of title:	the art of fabricating nanoelectronic and nanophotonic devices and systems /
other author:	Feldman, Martin,
Published:	Oxford :Woodhead Publishing,2014.
Description:	1 online resource (xxiv, 573 p.) :ill.
Subject:	Nanolithography.
Online resource:	click for full text
ISBN:	9780857095008 (electronic bk.)

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - 1 online resource (xxiv, 573 p.) :ill. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 41..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

752431
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /
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245 0 0 $a Nanolithography $h [electronic resource] : $b the art of fabricating nanoelectronic and nanophotonic devices and systems / $c edited by Martin Feldman.
260 $a Oxford : $b Woodhead Publishing, $c 2014.
300 $a 1 online resource (xxiv, 573 p.) : $b ill.
490 1 $a Woodhead Publishing series in electronic and optical materials ; $v no. 42
504 $a Includes bibliographical references and index.
650 0 $a Nanolithography. $3 752431
700 1 $a Feldman, Martin, $e editor of compilation. $3 752430
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 41. $3 619284
856 4 0 $u http://www.sciencedirect.com/science/book/9780857095008 $z click for full text