Coaxial lithography
Ozel, Tuncay.

 

  • Coaxial lithography
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Coaxial lithographyby Tuncay Ozel.
    Author: Ozel, Tuncay.
    Published: Cham :Springer International Publishing :2016.
    Description: xxix, 92 p. :ill., digital ;24 cm.
    Contained By: Springer eBooks
    Subject: Nanolithography.
    Online resource: http://dx.doi.org/10.1007/978-3-319-45414-6
    ISBN: 9783319454146$q(electronic bk.)
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