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Nanofabricationprinciples, capabilit...

Cui, Zheng.

Nanofabricationprinciples, capabilities and limits /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Nanofabricationby Zheng Cui.
Reminder of title:	principles, capabilities and limits /
Author:	Cui, Zheng.
Published:	Cham :Springer International Publishing :2017.
Description:	xvii, 432 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Nanotechnology.
Online resource:	http://dx.doi.org/10.1007/978-3-319-39361-2
ISBN:	9783319393612$q(electronic bk.)

Nanofabricationprinciples, capabilities and limits /
Cui, Zheng.

Nanofabricationprinciples, capabilities and limits /[electronic resource] :by Zheng Cui. - 2nd ed. - Cham :Springer International Publishing :2017. - xvii, 432 p. :ill., digital ;24 cm.

1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

ISBN: 9783319393612$q(electronic bk.)

Standard No.: 10.1007/978-3-319-39361-2doiSubjects--Topical Terms:

193873
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 620.5

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505 0 $a 1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.
520 $a This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
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