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Electrochemical micromachining for n...

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Bhattacharyya, Bijoy,

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology

Record Type:	Electronic resources : Monograph/item
Title/Author:	Electrochemical micromachining for nanofabrication, MEMS and nanotechnologyBijoy Bhattacharyya.
Author:	Bhattacharyya, Bijoy,
Published:	Oxford, UK :William Andrew, an imprint of Elsevier,2015.
Description:	1 online resource.
Subject:	Micromachining.
Online resource:	http://www.sciencedirect.com/science/book/9780323327374
ISBN:	9780323327374 (electronic bk.)

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
Bhattacharyya, Bijoy,

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology[electronic resource] /Bijoy Bhattacharyya. - Oxford, UK :William Andrew, an imprint of Elsevier,2015. - 1 online resource.

Includes bibliographical refereneces.

ISBN: 9780323327374 (electronic bk.)Subjects--Topical Terms:

200384
Micromachining.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TJ1191.5

Dewey Class. No.: 620.5

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
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020 $a 9780323327374 (electronic bk.)
020 $a 9780323352888 (electronic bk.)
020 $a 032335288X (electronic bk.)
035 $a (OCoLC)ocn907467274
035 $a els17001235
040 $a UIU $b eng $c UIU $d IDEBK $d EBLCP $d UIU $d OPELS
041 0 $a eng
050 4 $a TJ1191.5
082 0 4 $a 620.5 $2 23
100 1 $a Bhattacharyya, Bijoy, $e author. $3 784088
245 1 0 $a Electrochemical micromachining for nanofabrication, MEMS and nanotechnology $h [electronic resource] / $c Bijoy Bhattacharyya.
260 $a Oxford, UK : $b William Andrew, an imprint of Elsevier, $c 2015.
300 $a 1 online resource.
504 $a Includes bibliographical refereneces.
650 0 $a Micromachining. $3 200384
650 0 $a Nanotechnology. $3 193873
650 0 $a Microelectromechanical systems. $3 189825
655 4 $a Electronic books. $2 local. $3 214472
856 4 0 $u http://www.sciencedirect.com/science/book/9780323327374

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1 records • Pages 1 •
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Inventory Number

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000000142877

電子館藏

1圖書

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EB TJ1191.5 2015

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1 records • Pages 1 •
1

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http://www.sciencedirect.com/science/book/9780323327374

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