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ULSI front-end technology :covering ...

Lau, W. S.

ULSI front-end technology :covering from the first semiconductor paper to CMOS FINFET technology /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	ULSI front-end technology :W S Lau.
Reminder of title:	covering from the first semiconductor paper to CMOS FINFET technology /
Author:	Lau, W. S.
Published:	Singapore :World Scientific Publishing Co. Pte. Ltd.,c2018.
Description:	xi, 234 p. :ill. ;24 cm.
Subject:	Integrated circuitsUltra large scale integration.
ISBN:	9813222158 (hbk.)

ULSI front-end technology :covering from the first semiconductor paper to CMOS FINFET technology /
Lau, W. S.

ULSI front-end technology :covering from the first semiconductor paper to CMOS FINFET technology /W S Lau. - Singapore :World Scientific Publishing Co. Pte. Ltd.,c2018. - xi, 234 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9813222158 (hbk.) Subjects--Topical Terms:

211363
Integrated circuits
--Ultra large scale integration.

LC Class. No.: TK7874.76 / .L366 2018

ULSI front-end technology :covering from the first semiconductor paper to CMOS FINFET technology /
LDR:00704cam a2200193 a 4500 001 524520
003 OCoLC
005 20180703040135.0
008 180731s2018 si a b 001 0 eng d
019 $a 992745901 $a 1012638295
020 $a 9813222158 (hbk.)
020 $a 9789813222151 (hbk.) : $c NT$2304
035 $a (OCoLC)988167672 $z (OCoLC)992745901 $z (OCoLC)1012638295
035 $a ocn988167672
040 $a YDX $b eng $c YDX $d SINLB $d OCLCF $d NTD
050 # 4 $a TK7874.76 $b .L366 2018
100 1 $a Lau, W. S. $3 796259
245 1 0 $a ULSI front-end technology : $b covering from the first semiconductor paper to CMOS FINFET technology / $c W S Lau.
260 # $a Singapore : $b World Scientific Publishing Co. Pte. Ltd., $c c2018.
300 $a xi, 234 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 # 0 $a Integrated circuits $x Ultra large scale integration. $3 211363
650 # 0 $a Metal oxide semiconductors, Complementary. $3 184467
650 # 0 $a Semiconductors $x History. $3 208516