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Mechanics of microsystems

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Corigliano, Alberto.

Mechanics of microsystems

Record Type:	Electronic resources : Monograph/item
Title/Author:	Mechanics of microsystemsAlberto Corigliano ... [et al.]
other author:	Corigliano, Alberto.
Published:	Hoboken, NJ :John Wiley & Sons,c2018.
Description:	1 online resource.
Subject:	Microelectromechanical systems.
Online resource:	https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828
ISBN:	9781119053828$q(electronic bk.)

Mechanics of microsystems
Mechanics of microsystems[electronic resource] /Alberto Corigliano ... [et al.] - 1st ed. - Hoboken, NJ :John Wiley & Sons,c2018. - 1 online resource. - Microsystem and nanotechnology series ;7646. - Wiley microsystem and nanotechnology series ;7646..

Includes bibliographical references and index.

ISBN: 9781119053828$q(electronic bk.)

LCCN: 2017052694Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Mechanics of microsystems
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020 $a 9781119053828$q(electronic bk.)
020 $a 111905382X$q(electronic bk.)
020 $a 9781119053804$q(electronic bk.)
020 $a 1119053803$q(electronic bk.)
020 $a 9781119053811$q(electronic bk.)
020 $a 1119053811$q(electronic bk.)
020 $z 9781119053835$q(cloth)
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040 $a DLC $b eng $c DLC $d OCLCO $d N $d IDEBK $d OCLCF $d UPM $d DG1 $d OCLCQ $d TEFOD $d UAB $d YDX $d COO
050 1 0 $a TK7875
082 0 0 $a 621.381 $2 23
245 0 0 $a Mechanics of microsystems $h [electronic resource] / $c Alberto Corigliano ... [et al.]
250 $a 1st ed.
260 $a Hoboken, NJ : $b John Wiley & Sons, $c c2018.
300 $a 1 online resource.
490 1 $a Microsystem and nanotechnology series ; $v 7646
504 $a Includes bibliographical references and index.
588 0 $a Print version record and CIP data provided by publisher; resource not viewed.
650 0 $a Microelectromechanical systems. $3 189825
700 1 $a Corigliano, Alberto. $3 814242
830 0 $a Wiley microsystem and nanotechnology series ; $v 7646. $3 814243
856 4 0 $u https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828

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1 records • Pages 1 •
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000000157243

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EB TK7875 c2018

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1 records • Pages 1 •
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https://onlinelibrary.wiley.com/doi/book/10.1002/9781119053828

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