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ULSI front-end technologycovering fr...

Lau, W. S.

ULSI front-end technologycovering from the first semiconductor paper to CMOS FINFET technology /

Record Type:	Electronic resources : Monograph/item
Title/Author:	ULSI front-end technologyW S Lau.
Reminder of title:	covering from the first semiconductor paper to CMOS FINFET technology /
Author:	Lau, W. S.
Published:	Singapore :World Scientific,c2018.
Description:	1 online resource (247 p.) :ill. (some col.)
Notes:	Title from PDF title page (viewed September 7, 2017)
Subject:	Integrated circuitsUltra large scale integration.
Online resource:	http://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc
ISBN:	9789813222168$q(electronic bk.)

ULSI front-end technologycovering from the first semiconductor paper to CMOS FINFET technology /
Lau, W. S.

ULSI front-end technologycovering from the first semiconductor paper to CMOS FINFET technology /[electronic resource] :W S Lau. - 1st ed. - Singapore :World Scientific,c2018. - 1 online resource (247 p.) :ill. (some col.)

Title from PDF title page (viewed September 7, 2017)

Includes bibliographical references and index.

"The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book."--Publisher's website.

Electronic reproduction.
Singapore :
World Scientific,
[2017]

Mode of access: World Wide Web.

ISBN: 9789813222168$q(electronic bk.)Subjects--Topical Terms:

211363
Integrated circuits
--Ultra large scale integration.

LC Class. No.: TK7874.76 / .L38 2018

Dewey Class. No.: 621.395

ULSI front-end technologycovering from the first semiconductor paper to CMOS FINFET technology /
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020 $z 9789813222151$q(hbk.)
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041 0 $a eng
050 0 4 $a TK7874.76 $b .L38 2018
082 0 4 $a 621.395 $2 23
100 1 $a Lau, W. S. $3 796259
245 1 0 $a ULSI front-end technology $h [electronic resource] : $b covering from the first semiconductor paper to CMOS FINFET technology / $c W S Lau.
250 $a 1st ed.
260 $a Singapore : $b World Scientific, $c c2018.
300 $a 1 online resource (247 p.) : $b ill. (some col.)
500 $a Title from PDF title page (viewed September 7, 2017)
504 $a Includes bibliographical references and index.
520 $a "The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book."--Publisher's website.
533 $a Electronic reproduction. $b Singapore : $c World Scientific, $d [2017]
538 $a Mode of access: World Wide Web.
588 $a Description based on print version record.
650 0 $a Integrated circuits $x Ultra large scale integration. $3 211363
650 0 $a Metal oxide semiconductors, Complementary. $3 184467
650 0 $a Semiconductors $x History. $3 208516
650 0 $a Electronic books. $3 242495
856 4 0 $u http://www.worldscientific.com/worldscibooks/10.1142/10495#t=toc