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MEMS packaging

Cheng, Yu-Ting.

MEMS packaging

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	MEMS packagingeditors, Y C Lee, Yu-Ting Cheng, Ramesh Ramadoss.
其他作者:	Lee, Y.C.
出版者:	Singapore :World Scientific,c2018.
面頁冊數:	1 online resource (363 p.) :ill. (some col.), ports. (some col.)
標題:	Microelectromechanical systems.
電子資源:	https://www.worldscientific.com/worldscibooks/10.1142/10692#t=toc
ISBN:	9789813229365$q(electronic bk.)

MEMS packaging
MEMS packaging[electronic resource] /editors, Y C Lee, Yu-Ting Cheng, Ramesh Ramadoss. - 1st ed. - Singapore :World Scientific,c2018. - 1 online resource (363 p.) :ill. (some col.), ports. (some col.) - WSPC series in advanced integration and packaging,v. 52315-473X ;. - WSPC series in advanced integration and packaging ;v. 1..

Includes bibliographical references and index.

"MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices. This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability."--

Electronic reproduction.
Singapore :
World Scientific,
[2017]

Mode of access: World Wide Web.

ISBN: 9789813229365$q(electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .M46 2018

Dewey Class. No.: 621.381

MEMS packaging
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245 0 0 $a MEMS packaging $h [electronic resource] / $c editors, Y C Lee, Yu-Ting Cheng, Ramesh Ramadoss.
250 $a 1st ed.
260 $a Singapore : $b World Scientific, $c c2018.
300 $a 1 online resource (363 p.) : $b ill. (some col.), ports. (some col.)
490 1 $a WSPC series in advanced integration and packaging, $x 2315-473X ; $v v. 5
504 $a Includes bibliographical references and index.
520 $a "MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices. This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability."-- $c Provided by publisher.
533 $a Electronic reproduction. $b Singapore : $c World Scientific, $d [2017]
538 $a Mode of access: World Wide Web.
588 $a Description based on online resource; title from PDF title page (viewed December 21, 2017)
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Microelectronic pakaging. $3 840148
650 0 $a Electronic books. $3 242495
700 1 $a Lee, Y.C. $3 840145
700 1 $a Cheng, Yu-Ting. $3 840146
700 1 $a Ramadoss, Ramesh. $3 840147
830 0 $a WSPC series in advanced integration and packaging ; $v v. 1. $3 697656
856 4 0 $u https://www.worldscientific.com/worldscibooks/10.1142/10692#t=toc