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DIY MEMSfabricating microelectromech...

Munro, Deborah.

DIY MEMSfabricating microelectromechanical systems in open use labs /

Record Type:	Electronic resources : Monograph/item
Title/Author:	DIY MEMSby Deborah Munro.
Reminder of title:	fabricating microelectromechanical systems in open use labs /
Author:	Munro, Deborah.
Published:	Cham :Springer International Publishing :2019.
Description:	xvi, 188 p. :ill. (some col.), digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems.
Online resource:	https://doi.org/10.1007/978-3-030-33073-6
ISBN:	9783030330736$q(electronic bk.)

DIY MEMSfabricating microelectromechanical systems in open use labs /
Munro, Deborah.

DIY MEMSfabricating microelectromechanical systems in open use labs /[electronic resource] :by Deborah Munro. - Cham :Springer International Publishing :2019. - xvi, 188 p. :ill. (some col.), digital ;24 cm.

Introduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.

ISBN: 9783030330736$q(electronic bk.)

Standard No.: 10.1007/978-3-030-33073-6doiSubjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .M86 2019

Dewey Class. No.: 621.3815

DIY MEMSfabricating microelectromechanical systems in open use labs /
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245 1 0 $a DIY MEMS $h [electronic resource] : $b fabricating microelectromechanical systems in open use labs / $c by Deborah Munro.
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300 $a xvi, 188 p. : $b ill. (some col.), digital ; $c 24 cm.
505 0 $a Introduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.
520 $a This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.
650 0 $a Microelectromechanical systems. $3 189825
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650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Biomedical Engineering/Biotechnology. $3 730838
650 2 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Industrial and Production Engineering. $3 273753
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