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Levitation micro-systemsapplications...

Poletkin, Kirill.

Levitation micro-systemsapplications to sensors and actuators /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Levitation micro-systemsby Kirill Poletkin.
Reminder of title:	applications to sensors and actuators /
Author:	Poletkin, Kirill.
Published:	Cham :Springer International Publishing :2021.
Description:	ix, 174 p. :ill., digital ;24 cm.
Contained By:	Springer Nature eBook
Subject:	Microelectromechanical systems.
Online resource:	https://doi.org/10.1007/978-3-030-58908-0
ISBN:	9783030589080$q(electronic bk.)

Levitation micro-systemsapplications to sensors and actuators /
Poletkin, Kirill.

Levitation micro-systemsapplications to sensors and actuators /[electronic resource] :by Kirill Poletkin. - Cham :Springer International Publishing :2021. - ix, 174 p. :ill., digital ;24 cm. - Microsystems and nanosystems,2198-0063. - Microsystems and nanosystems..

Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

ISBN: 9783030589080$q(electronic bk.)

Standard No.: 10.1007/978-3-030-58908-0doiSubjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .P65 2021

Dewey Class. No.: 621.381

Levitation micro-systemsapplications to sensors and actuators /
LDR:01751nmm a2200337 a 4500 001 595925
003 DE-He213
005 20201118232331.0
006 m d
007 cr nn 008maaau
008 211013s2021 sz s 0 eng d
020 $a 9783030589080$q(electronic bk.)
020 $a 9783030589073$q(paper)
024 7 $a 10.1007/978-3-030-58908-0 $2 doi
035 $a 978-3-030-58908-0
040 $a GP $c GP $e rda
041 0 $a eng
050 4 $a TK7875 $b .P65 2021
072 7 $a TDPB $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TDP $2 thema
082 0 4 $a 621.381 $2 23
090 $a TK7875 $b .P765 2021
100 1 $a Poletkin, Kirill. $3 888475
245 1 0 $a Levitation micro-systems $h [electronic resource] : $b applications to sensors and actuators / $c by Kirill Poletkin.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2021.
300 $a ix, 174 p. : $b ill., digital ; $c 24 cm.
490 1 $a Microsystems and nanosystems, $x 2198-0063
505 0 $a Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.
520 $a This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Microactuators. $3 888476
650 1 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Materials Science, general. $3 308687
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer Nature eBook
830 0 $a Microsystems and nanosystems. $3 711243
856 4 0 $u https://doi.org/10.1007/978-3-030-58908-0
950 $a Engineering (SpringerNature-11647)