• Fabrication of micro/nano structures via precision machiningmodelling, processing and evaluation /
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Fabrication of micro/nano structures via precision machiningedited by Guoqing Zhang ... [et al.].
    Reminder of title: modelling, processing and evaluation /
    other author: Zhang, Guoqing.
    Published: Singapore :Springer Nature Singapore :2023.
    Description: xii, 398 p. :ill., digital ;24 cm.
    Contained By: Springer Nature eBook
    Subject: Micromachining.
    Online resource: https://doi.org/10.1007/978-981-99-1338-1
    ISBN: 9789819913381$q(electronic bk.)
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