| Record Type: |
Electronic resources
: Monograph/item
|
| Title/Author: |
Fabrication of micro/nano structures via precision machiningedited by Guoqing Zhang ... [et al.]. |
| Reminder of title: |
modelling, processing and evaluation / |
| other author: |
Zhang, Guoqing. |
| Published: |
Singapore :Springer Nature Singapore :2023. |
| Description: |
xii, 398 p. :ill., digital ;24 cm. |
| Contained By: |
Springer Nature eBook |
| Subject: |
Micromachining. |
| Online resource: |
https://doi.org/10.1007/978-981-99-1338-1 |
| ISBN: |
9789819913381$q(electronic bk.) |