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Spectroscopic techniques for semiconductor industry

Record Type:	Electronic resources : Monograph/item
Title/Author:	Spectroscopic techniques for semiconductor industryVladimir Protopopov.
Author:	Protopopov, V. V.
Published:	Singapore ;World Scientific,c2023.
Description:	1 online resource :ill.
Subject:	Spectrum analysisIndustrial applications.
Online resource:	https://www.worldscientific.com/worldscibooks/10.1142/12882#t=toc
ISBN:	9789811257605$q(ebook for institutions)

Spectroscopic techniques for semiconductor industry
Protopopov, V. V.

Spectroscopic techniques for semiconductor industry[electronic resource] /Vladimir Protopopov. - 1st ed. - Singapore ;World Scientific,c2023. - 1 online resource :ill.

Includes bibliographical references and index.

Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.

"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--

ISBN: 9789811257605$q(ebook for institutions)

LCCN: 2022021000Subjects--Topical Terms:

646682
Spectrum analysis
--Industrial applications.

LC Class. No.: QC451.6 / .P76 2023

Dewey Class. No.: 621.36/1

Spectroscopic techniques for semiconductor industry
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100 1 $a Protopopov, V. V. $q (Vladimir Vsevolodovich) $3 976663
245 1 0 $a Spectroscopic techniques for semiconductor industry $h [electronic resource] / $c Vladimir Protopopov.
250 $a 1st ed.
260 $a Singapore ; $a Hackensack, NJ : $b World Scientific, $c c2023.
300 $a 1 online resource : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a Basics of grating spectrometers -- Basics of Fourier-transform spectrometers -- High-resolution spectroscopy -- Imaging spectrometers -- Gated intensified spectrometers -- Modulation-sensitive and frequency-selective spectroscopy -- Optical diagnostics in plasma etching machines -- Spectral reflectometry -- Related non-spectroscopic techniques.
520 $a "The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"-- $c Provided by publisher.
588 $a Description based on print version record.
650 0 $a Spectrum analysis $x Industrial applications. $3 646682
650 0 $a Semiconductors $x Design and construction. $3 182501
856 4 0 $u https://www.worldscientific.com/worldscibooks/10.1142/12882#t=toc