Microelectromechanical systems - Mathematical models.

Modelling of microfabrication systems / by: (Language materials, printed)

MEMS linear and nonlinear statics and dynamics by: (Electronic resources)

Numerical simulation of mechatronic sensors and actuatorsfinite elements for computational multiphysics / by: (Electronic resources)

MEMSfield models and optimal design / by: (Electronic resources)

Mechatronics.

Nanotechnology.

Acoustics.

Microelectromechanical systems.

Biomedical Engineering and Bioengineering.

Microelectronics

Electronics and Microelectronics, Instrumentation.

Mechatronics

Statics

Dynamics

Statistical Physics, Dynamical Systems and Complexity.

Circuits and Systems.

Continuum Mechanics and Mechanics of Materials.

Computational Intelligence.

Nanotechnology and Microengineering.

Engineering.

Optical and Electronic Materials.

Integrated circuits

Microelectromechanical systems

Finite element method.