| Record Type: |
Language materials, printed
: Monograph/item
|
| Title/Author: |
Foundations of MEMS /Chang Liu. |
| Author: |
Liu, Chang, |
| Published: |
Upper Saddle River, NJ :Pearson/Prentice Hall,c2006. |
| Description: |
xxii, 530 p. :ill. ;24 cm. |
| Subject: |
Microelectromechanical systems. |
| ISBN: |
013199204X (pbk. Pearson international edition) : |