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Advances in CMP/polishing technologi...

Doi, Toshiro.

Advances in CMP/polishing technologies for the manufacture of electronic devices

Record Type:	Electronic resources : Monograph/item
Title/Author:	Advances in CMP/polishing technologies for the manufacture of electronic devicesedited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa.
other author:	Doi, Toshiro.
Published:	Oxford :William Andrew,2012.
Description:	1 online resource (xii, 317 p.)
Notes:	Includes index.
Subject:	Electrolytic polishing.
Online resource:	http://www.sciencedirect.com/science/book/9781437778595
ISBN:	9781437778595

Advances in CMP/polishing technologies for the manufacture of electronic devices
Advances in CMP/polishing technologies for the manufacture of electronic devices[electronic resource] /edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa. - 1st ed. - Oxford :William Andrew,2012. - 1 online resource (xii, 317 p.)

Includes index.

CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R&D accessible to the wider engineering community.

ISBN: 9781437778595Subjects--Topical Terms:

586519
Electrolytic polishing.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TS670 / .A386 2012eb

Dewey Class. No.: 671.7/2

Advances in CMP/polishing technologies for the manufacture of electronic devices
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245 0 0 $a Advances in CMP/polishing technologies for the manufacture of electronic devices $h [electronic resource] / $c edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa.
250 $a 1st ed.
260 $a Oxford : $b William Andrew, $c 2012.
300 $a 1 online resource (xii, 317 p.)
500 $a Includes index.
520 $a CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R&D accessible to the wider engineering community.
650 0 $a Electrolytic polishing. $3 586519
650 0 $a Grinding and polishing. $3 348463
655 4 $a Electronic books. $2 local. $3 214472
700 1 $a Doi, Toshiro. $4 edt $3 586516
700 1 $a Marinescu, Ioan D. $4 edt $3 586517
700 1 $a Kurokawa, Syuhei. $4 edt $3 586518
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9781437778595
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