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Ceramic thick films for MEMS and mic...

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Dorey, Robert A.

Ceramic thick films for MEMS and microdevices

Record Type:	Electronic resources : Monograph/item
Title/Author:	Ceramic thick films for MEMS and microdevicesRobert A. Dorey.
Author:	Dorey, Robert A.
Published:	Waltham, [MA] :William Andrew,2012.
Description:	xviii, 191 p. :ill. ;24 cm.
Subject:	Thick-film circuitsDesign and construction.
Online resource:	http://www.sciencedirect.com/science/book/9781437778175
ISBN:	9781437778175 (electronic bk.)

Ceramic thick films for MEMS and microdevices
Dorey, Robert A.

Ceramic thick films for MEMS and microdevices[electronic resource] /Robert A. Dorey. - Waltham, [MA] :William Andrew,2012. - xviii, 191 p. :ill. ;24 cm. - Micro and nano technologies series. - Micro & nano technologies..

Includes bibliographical references (p. 183-185) and index.

ISBN: 9781437778175 (electronic bk.)

LCCN: 2011276747Subjects--Topical Terms:

646804
Thick-film circuits
--Design and construction.

LC Class. No.: TK7871.15.F5 / D67 2012

Dewey Class. No.: 621.3815

Ceramic thick films for MEMS and microdevices
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020 $a 9781437778175 (electronic bk.)
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082 0 4 $a 621.3815 $2 23
100 1 $a Dorey, Robert A. $3 550674
245 1 0 $a Ceramic thick films for MEMS and microdevices $h [electronic resource] / $c Robert A. Dorey.
260 $a Waltham, [MA] : $b William Andrew, $c 2012.
300 $a xviii, 191 p. : $b ill. ; $c 24 cm.
490 0 $a Micro and nano technologies series
504 $a Includes bibliographical references (p. 183-185) and index.
650 0 $a Thick-film circuits $x Design and construction. $3 646804
650 0 $a Microelectromechanical systems $x Design and construction. $3 206811
650 0 $a Nanoelectronics. $3 308072
830 0 $a Micro & nano technologies. $3 454929
856 4 0 $u http://www.sciencedirect.com/science/book/9781437778175

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EB TK7871.15.F5 D67 2012

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