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Fundamental principles of engineerin...

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Leach, R. K.

Fundamental principles of engineering nanometrology

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Fundamental principles of engineering nanometrologyRichard Leach.
作者:	Leach, R. K.
出版者:	Oxford, OX :Elsevier, William Andrew,2014.
面頁冊數:	xxi, 361 p. :ill. ;25 cm.
標題:	Metrology.
電子資源:	http://www.sciencedirect.com/science/book/9781455777532
ISBN:	9781455777532

Fundamental principles of engineering nanometrology
Leach, R. K.

Fundamental principles of engineering nanometrology[electronic resource] /Richard Leach. - 2nd ed. - Oxford, OX :Elsevier, William Andrew,2014. - xxi, 361 p. :ill. ;25 cm. - Micro & nano technologies series. - Micro & nano technologies..

Includes bibliographical references and index.

ISBN: 9781455777532Subjects--Topical Terms:

486307
Metrology.

LC Class. No.: T174.7 / .L42 2014

Dewey Class. No.: 620.50287

Fundamental principles of engineering nanometrology
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