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Handbook of thin film technology

Frey, Hartmut.

Handbook of thin film technology

Record Type:	Electronic resources : Monograph/item
Title/Author:	Handbook of thin film technologyedited by Hartmut Frey, Hamid R. Khan.
other author:	Frey, Hartmut.
Published:	Berlin, Heidelberg :Springer Berlin Heidelberg :2015.
Description:	xiii, 379 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Thin filmsCongresses.
Online resource:	http://dx.doi.org/10.1007/978-3-642-05430-3
ISBN:	9783642054303 (electronic bk.)

Handbook of thin film technology
Handbook of thin film technology[electronic resource] /edited by Hartmut Frey, Hamid R. Khan. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xiii, 379 p. :ill., digital ;24 cm.

Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.

"Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

ISBN: 9783642054303 (electronic bk.)

Standard No.: 10.1007/978-3-642-05430-3doiSubjects--Topical Terms:

439264
Thin films
--Congresses.

LC Class. No.: TA418.9.T45

Dewey Class. No.: 621.38152

Handbook of thin film technology
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505 0 $a Applications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films.
520 $a "Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
650 0 $a Thin films $v Congresses. $3 439264
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650 2 4 $a Characterization and Evaluation of Materials. $3 273978
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650 2 4 $a Tribology, Corrosion and Coatings. $3 274658
650 2 4 $a Physical Chemistry. $3 273698
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