Advanced mechatronics and MEMS devic...
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  • Advanced mechatronics and MEMS devices.II
  • Record Type: Electronic resources : Monograph/item
    Title/Author: Advanced mechatronics and MEMS devices.edited by Dan Zhang, Bin Wei.
    other author: Zhang, Dan.
    Published: Cham :Springer International Publishing :2017.
    Description: xvii, 718 p. :ill., digital ;24 cm.
    Contained By: Springer eBooks
    Subject: Microelectromechanical systems.
    Online resource: http://dx.doi.org/10.1007/978-3-319-32180-6
    ISBN: 9783319321806$q(electronic bk.)
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