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Thermoelectrical effect in SiC for h...

Dao, Dzung Viet.

Thermoelectrical effect in SiC for high-temperature MEMS sensors

Record Type:	Electronic resources : Monograph/item
Title/Author:	Thermoelectrical effect in SiC for high-temperature MEMS sensorsby Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao.
Author:	Dinh, Toan.
other author:	Nguyen, Nam-Trung.
Published:	Singapore :Springer Singapore :2018.
Description:	xi, 115 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Silicon carbideThermal properties.
Online resource:	https://doi.org/10.1007/978-981-13-2571-7
ISBN:	9789811325717$q(electronic bk.)

Thermoelectrical effect in SiC for high-temperature MEMS sensors
Dinh, Toan.

Thermoelectrical effect in SiC for high-temperature MEMS sensors[electronic resource] /by Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao. - Singapore :Springer Singapore :2018. - xi, 115 p. :ill., digital ;24 cm. - SpringerBriefs in applied sciences and technology,2191-530X. - SpringerBriefs in applied sciences and technology..

Introduction to SiC and Thermoelectrical Properties -- Fundamentals of Thermoelectrical Effect in SiC -- Desirable Features for High Temperature SiC Sensors -- Fabrication of SiC MEMS Sensors -- Impact of Design and Process on Performance of SiC Thermal Devices -- Applications of Thermoelectrical Effect in SiC -- Future prospects of SiC Thermoelectrical Sensing Devices.

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

ISBN: 9789811325717$q(electronic bk.)

Standard No.: 10.1007/978-981-13-2571-7doiSubjects--Topical Terms:

822998
Silicon carbide
--Thermal properties.

LC Class. No.: TK7871.15.S56 / D564 2018

Dewey Class. No.: 621.38152

Thermoelectrical effect in SiC for high-temperature MEMS sensors
LDR:02242nmm a2200337 a 4500 001 544442
003 DE-He213
005 20190311143218.0
006 m d
007 cr nn 008maaau
008 190508s2018 si s 0 eng d
020 $a 9789811325717$q(electronic bk.)
020 $a 9789811325700$q(paper)
024 7 $a 10.1007/978-981-13-2571-7 $2 doi
035 $a 978-981-13-2571-7
040 $a GP $c GP
041 0 $a eng
050 4 $a TK7871.15.S56 $b D564 2018
072 7 $a TBN $2 bicssc
072 7 $a TEC027000 $2 bisacsh
072 7 $a TBN $2 thema
082 0 4 $a 621.38152 $2 23
090 $a TK7871.15.S56 $b D584 2018
100 1 $a Dinh, Toan. $3 822995
245 1 0 $a Thermoelectrical effect in SiC for high-temperature MEMS sensors $h [electronic resource] / $c by Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao.
260 $a Singapore : $b Springer Singapore : $b Imprint: Springer, $c 2018.
300 $a xi, 115 p. : $b ill., digital ; $c 24 cm.
490 1 $a SpringerBriefs in applied sciences and technology, $x 2191-530X
505 0 $a Introduction to SiC and Thermoelectrical Properties -- Fundamentals of Thermoelectrical Effect in SiC -- Desirable Features for High Temperature SiC Sensors -- Fabrication of SiC MEMS Sensors -- Impact of Design and Process on Performance of SiC Thermal Devices -- Applications of Thermoelectrical Effect in SiC -- Future prospects of SiC Thermoelectrical Sensing Devices.
520 $a This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
650 0 $a Silicon carbide $x Thermal properties. $3 822998
650 0 $a Thermoelectricity. $3 679656
650 1 4 $a Nanotechnology. $3 193873
650 2 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Solid State Physics. $3 376486
700 1 $a Nguyen, Nam-Trung. $3 822996
700 1 $a Dao, Dzung Viet. $3 822997
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
830 0 $a SpringerBriefs in applied sciences and technology. $3 557662
856 4 0 $u https://doi.org/10.1007/978-981-13-2571-7
950 $a Chemistry and Materials Science (Springer-11644)