國立高雄大學圖資館 |

Language: English

Back

Flash lamp annealingfrom basics to a...

Prucnal, Slawomir.

Flash lamp annealingfrom basics to applications /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Flash lamp annealingby Lars Rebohle, Slawomir Prucnal, Denise Reichel.
Reminder of title:	from basics to applications /
Author:	Rebohle, Lars.
other author:	Prucnal, Slawomir.
Published:	Cham :Springer International Publishing :2019.
Description:	xviii, 288 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
Subject:	Materials science.
Online resource:	https://doi.org/10.1007/978-3-030-23299-3
ISBN:	9783030232993$q(electronic bk.)

Flash lamp annealingfrom basics to applications /
Rebohle, Lars.

Flash lamp annealingfrom basics to applications /[electronic resource] :by Lars Rebohle, Slawomir Prucnal, Denise Reichel. - Cham :Springer International Publishing :2019. - xviii, 288 p. :ill., digital ;24 cm. - Springer series in materials science,v.2880933-033X ;. - Springer series in materials science ;v. 62..

Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

ISBN: 9783030232993$q(electronic bk.)

Standard No.: 10.1007/978-3-030-23299-3doiSubjects--Topical Terms:

221779
Materials science.

LC Class. No.: TA403.6 / .R436 2019

Dewey Class. No.: 620.11

Flash lamp annealingfrom basics to applications /
LDR:02295nmm a2200337 a 4500 001 564061
003 DE-He213
005 20191213112318.0
006 m d
007 cr nn 008maaau
008 200311s2019 gw s 0 eng d
020 $a 9783030232993$q(electronic bk.)
020 $a 9783030232986$q(paper)
024 7 $a 10.1007/978-3-030-23299-3 $2 doi
035 $a 978-3-030-23299-3
040 $a GP $c GP
041 0 $a eng
050 4 $a TA403.6 $b .R436 2019
072 7 $a TJFD5 $2 bicssc
072 7 $a TEC008090 $2 bisacsh
072 7 $a TJFD $2 thema
082 0 4 $a 620.11 $2 23
090 $a TA403.6 $b .R292 2019
100 1 $a Rebohle, Lars. $3 493844
245 1 0 $a Flash lamp annealing $h [electronic resource] : $b from basics to applications / $c by Lars Rebohle, Slawomir Prucnal, Denise Reichel.
260 $a Cham : $b Springer International Publishing : $b Imprint: Springer, $c 2019.
300 $a xviii, 288 p. : $b ill., digital ; $c 24 cm.
490 1 $a Springer series in materials science, $x 0933-033X ; $v v.288
505 0 $a Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
520 $a This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
650 0 $a Materials science. $3 221779
650 1 4 $a Semiconductors. $3 182134
650 2 4 $a Optical and Electronic Materials. $3 274099
650 2 4 $a Manufacturing, Machines, Tools, Processes. $3 833130
650 2 4 $a Optics, Lasers, Photonics, Optical Devices. $3 758151
650 2 4 $a Microwaves, RF and Optical Engineering. $3 274186
650 2 4 $a Nanotechnology and Microengineering. $3 348421
700 1 $a Prucnal, Slawomir. $3 849884
700 1 $a Reichel, Denise. $3 732824
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
830 0 $a Springer series in materials science ; $v v. 62. $3 438346
856 4 0 $u https://doi.org/10.1007/978-3-030-23299-3
950 $a Physics and Astronomy (Springer-11651)