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Microelectronic applications of chem...

Li, Yuzhuo.

Microelectronic applications of chemical mechanical planarization /

Record Type:	Electronic resources : Monograph/item
Title/Author:	Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li.
other author:	Li, Yuzhuo.
Published:	Hoboken, N.J. :John Wiley,2007.
Description:	p. cm.
Notes:	"Wiley Interscience."
Subject:	Chemical mechanical planarization.
Online resource:	Authentication may be required:
Online resource:	http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
Online resource:	http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html
ISBN:	9780470180907 (electronic bk.)

Microelectronic applications of chemical mechanical planarization /
Microelectronic applications of chemical mechanical planarization /[electronic resource] /edited by Yuzhuo Li. - Hoboken, N.J. :John Wiley,2007. - p. cm.

"Wiley Interscience."

Includes bibliographical references.

ISBN: 9780470180907 (electronic bk.)

LCCN: 2007015557Subjects--Topical Terms:

265685
Chemical mechanical planarization.

LC Class. No.: TK7874 / .M4675 2007

Dewey Class. No.: 621.3815

Microelectronic applications of chemical mechanical planarization /
LDR:01317cmm _22002538a_450 001 181339
005 19990415133044.0
008 090528s2007 nju 000 0 eng
010 $a 2007015557
020 $a 9780470180907 (electronic bk.)
020 $a 9780471719199
035 $a 00319402
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7874 $b .M4675 2007
082 0 0 $2 22 $a 621.3815
245 0 0 $a Microelectronic applications of chemical mechanical planarization / $c edited by Yuzhuo Li. $h [electronic resource] /
260 # $a Hoboken, N.J. : $c 2007. $b John Wiley,
263 $a 0712
300 $a p. cm.
500 $a "Wiley Interscience."
504 $a Includes bibliographical references.
650 # 0 $a Chemical mechanical planarization. $3 265685
650 # 0 $a Microelectronics $x Materials. $3 184283
650 # 0 $a Integrated circuits $x Design and construction. $3 184690
700 0 # $a Li, Yuzhuo. $3 265684
856 4 0 $a E-Books (Wiley) $u http://libsw.nuk.edu.tw:81/login?url=http://www3.interscience.wiley.com/cgi-bin/homepage/?isbn=9780470180907 $z Authentication may be required:
856 4 1 $3 Table of contents only $u http://www.loc.gov/catdir/toc/ecip0715/2007015557.html $z http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
856 4 2 $3 Contributor biographical information $u http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html $z http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html $z http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html

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http://libsw.nuk.edu.tw:81/login?url=http://www3.interscience.wiley.com/cgi-bin/homepage/?isbn=9780470180907
http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html

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