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書目資訊
主題
Chemical mechanical planarization.
概要
作品:
4 作品在 3 項出版品 3 種語言
書目資訊
Microelectronic applications of chemical mechanical planarization /
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(書目-電子資源)
Microelectronic applications of chemical mechanical planarization /
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(書目-語言資料,印刷品)
Advances in chemical mechanical planarization (CMP)
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(書目-電子資源)
Research on chemical mechanical polishing mechanism of novel diffusion barrier Ru for Cu interconnect
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(書目-電子資源)
主題
Manufacturing, Machines, Tools.
Chemical mechanical planarization.
Tribology, Corrosion and Coatings.
Microelectronics
Microelectronics.
Ruthenium.
Electronics and Microelectronics, Instrumentation.
Nanoelectronics.
Engineering.
Integrated circuits
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