國立高雄大學圖資館 |

Language: English

圖資館首頁

Login

Back

Switch To: Labeled | MARC Mode | ISBD

Advances in chemical mechanical plan...

~

Babu, S. V.,

Advances in chemical mechanical planarization (CMP)

Record Type:	Electronic resources : Monograph/item
Title/Author:	Advances in chemical mechanical planarization (CMP)edited by Suryadevara Babu.
other author:	Babu, S. V.,
Published:	Waltham, MA :Woodhead Publishing,2016.
Description:	1 online resource.
Subject:	Chemical mechanical planarization.
Online resource:	http://www.sciencedirect.com/science/book/9780081001653
ISBN:	9780081001653 (electronic bk.)

Advances in chemical mechanical planarization (CMP)
Advances in chemical mechanical planarization (CMP)[electronic resource] /edited by Suryadevara Babu. - Waltham, MA :Woodhead Publishing,2016. - 1 online resource. - Woodhead publishing series in electronic and optical materials ;number 86. - Woodhead Publishing series in electronic and optical materials ;no. 41..

Includes bibliographical references and index.

ISBN: 9780081001653 (electronic bk.)Subjects--Topical Terms:

265685
Chemical mechanical planarization.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7874.84

Dewey Class. No.: 621.381

Advances in chemical mechanical planarization (CMP)
LDR:00924nmm a2200253 a 4500 001 514181
005 20170427104644.0
006 m o d
007 cr cnu|||unuuu
008 180118s2016 mau ob 001 0 eng d
020 $a 9780081001653 (electronic bk.)
020 $a 9780081002186 (electronic bk.)
020 $a 0081002181 (electronic bk.)
035 $a (OCoLC)ocn934626626
035 $a els17001644
040 $a UIU $b eng $c UIU $d YDXCP $d UIU $d CDX $d OCLCF $d OPELS
041 0 $a eng
050 4 $a TK7874.84
082 0 4 $a 621.381 $2 23
245 0 0 $a Advances in chemical mechanical planarization (CMP) $h [electronic resource] / $c edited by Suryadevara Babu.
260 $a Waltham, MA : $b Woodhead Publishing, $c 2016.
300 $a 1 online resource.
490 1 $a Woodhead publishing series in electronic and optical materials ; $v number 86
504 $a Includes bibliographical references and index.
650 0 $a Chemical mechanical planarization. $3 265685
650 0 $a Nanoelectronics. $3 308072
650 0 $a Microelectronics. $3 182484
655 4 $a Electronic books. $2 local. $3 214472
700 1 $a Babu, S. V., $e editor. $3 783685
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 41. $3 619284
856 4 0 $u http://www.sciencedirect.com/science/book/9780081001653

based on 0 review(s)

Items

1 records • Pages 1 •
1

Inventory Number

No. of reservations

000000142646

電子館藏

1圖書

電子書

EB TK7874.84 2016

一般使用(Normal)

On shelf

0

1 records • Pages 1 •
1

Multimedia

Multimedia file
http://www.sciencedirect.com/science/book/9780081001653

Reviews

Add a review and share your thoughts with other readers

Export

pickup library

Change password

Login