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Plasma processes for semiconductor f...

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Hitchon, W. Nicholas G.

Plasma processes for semiconductor fabrication /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Plasma processes for semiconductor fabrication /W.N.G. Hitchon.
作者:	Hitchon, W. Nicholas G.
出版者:	Cambridge ;Cambridge University Press,2005.
面頁冊數:	ix, 221 p. :ill. ;26 cm.
叢書名:	Cambridge studies in semiconductor physics and microelectronic engineering ;
標題:	Plasma etching.
電子資源:	http://www.loc.gov/catdir/toc/cam025/98011717.html
電子資源:	http://www.loc.gov/catdir/description/cam029/98011717.html
ISBN:	0521591759 (hbk.)

Plasma processes for semiconductor fabrication /
Hitchon, W. Nicholas G.

Plasma processes for semiconductor fabrication /W.N.G. Hitchon. - Cambridge ;Cambridge University Press,2005. - ix, 221 p. :ill. ;26 cm. - Cambridge studies in semiconductor physics and microelectronic engineering ;8.

Includes bibliographical references (p. 205-211) and index.

ISBN: 0521591759 (hbk.)

LCCN: 98011717 Subjects--Topical Terms:

225107
Plasma etching.

LC Class. No.: TK7871.85 / .H54 2005

Dewey Class. No.: 621.3815/2

Plasma processes for semiconductor fabrication /
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010 $a 98011717
020 $a 0521591759 (hbk.)
020 $a 9780521018005 (pbk.)
020 $a 9780521591751 (hbk.)
020 $a 0521018005 (pbk.) : $c NT1010
035 $a 00248123
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7871.85 $b .H54 2005
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100 $a Hitchon, W. Nicholas G. $3 245858
245 1 0 $a Plasma processes for semiconductor fabrication / $c W.N.G. Hitchon.
260 $a Cambridge ; $a New York : $c 2005. $b Cambridge University Press,
300 $a ix, 221 p. : $b ill. ; $c 26 cm.
440 0 $a Cambridge studies in semiconductor physics and microelectronic engineering ; $v 8
504 $a Includes bibliographical references (p. 205-211) and index.
650 $a Plasma etching. $3 225107
650 $a Semiconductors $x Etching. $3 245859
856 4 1 $3 Table of contents $u http://www.loc.gov/catdir/toc/cam025/98011717.html $z http://www.loc.gov/catdir/toc/cam025/98011717.html
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/description/cam029/98011717.html $z http://www.loc.gov/catdir/description/cam029/98011717.html

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http://www.loc.gov/catdir/toc/cam025/98011717.html
http://www.loc.gov/catdir/description/cam029/98011717.html

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