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書目資訊
主題
Plasma etching.
概要
作品:
10 作品在 3 項出版品 3 種語言
書目資訊
Principles of plasma discharges and materials processing /
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(書目-電子資源)
Plasma processes for semiconductor fabrication /
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(書目-語言資料,印刷品)
Dry etching for VLSI /
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(書目-語言資料,印刷品)
Plasma properties, deposition and etching /
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(書目-語言資料,印刷品)
Low pressure plasmas and microstructuring technology
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(書目-電子資源)
Feature profile evolution in plasma processing using on-wafer monitoring system
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(書目-電子資源)
Dry etching technology for semiconductors
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(書目-電子資源)
Plasma etching processes for CMOS device realization /
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(書目-語言資料,印刷品)
Plasma etching processes for CMOS device realization /
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(書目-電子資源)
A Systematic Study of GaN Static Induction Transistors (a.k.a. Vertical FinFETs) for RF Applications.
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(書目-電子資源)
主題
Nanoscale Science and Technology.
Semiconductors.
Plasma engineering.
Nanotechnology.
Condensed matter physics.
Plasma etching.
Material Science.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Plasma Physics.
Metal oxide semiconductors, Complementary
Transistors.
Electrical engineering.
Plasma dynamics.
Plasma diagnostics.
Circuits and Systems.
Atomic and Molecular Structure and Spectra.
Nanotechnology and Microengineering.
Plasma chemistry
Semiconductors
Plasma (Ionized gases)
Optical and Electronic Materials.
Engineering.
Thin films
Integrated circuits
Electronic Circuits and Devices.
Metal oxide semiconductors, Complementary.
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