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Microelectromechanical systems.

Overview

Works:	91 works in 51 publications in 51 languages

Titles

Electromechanical systems, electric machines, and applied mechatronics / by: (Language materials, printed)

Travels to the nanoworld :miniature machinery in nature and technology / by: (Language materials, printed)

Introduction to microfabrication / by: (Language materials, printed)

Micromechatronics :modeling, analysis, and design with MATLAB / by: (Language materials, printed)

RF MEMS and their applications / by: (Electronic resources)

RF MEMS :theory, design, and technology / by: (Electronic resources)

Enabling technology for MEMS and nanodevices / by: (Language materials, printed)

Principles and applications of NanoMEMS physics / by: (Language materials, printed)

Foundations of MEMS / by: (Language materials, printed)

An introduction to microelectromechanical systems engineering / by: (Language materials, printed)

主題

Mechatronics.

Radio circuits

Quantum electronics.

Detectors.

Biophysics/Biomedical Physics.

Chemistry.

Biomaterials.

Manufacturing, Machines, Tools.

Silicon carbide.

Thermal conductivity.

Microwaves, RF and Optical Engineering.

Control, Robotics, Mechatronics.

Piezoelectric devices.

Pattern recognition systems.

Image Processing and Computer Vision.

Mechanics.

Nanoscale Science and Technology.

Medical instruments and apparatus.

Atomizers.

Electrostatic atomization

Sustainable Development.

Nanostructured materials.

Solid State Physics.

Microengineering.

Manufactures.

Signal, Speech and Image Processing.

Applied Dynamical Systems.

Microelectromechanical systems.

Nanotechnology.

Microfluidics.

Separation (Technology)

Nuclear spin.

Smart materials.

Biomedical Engineering.

Engineering Design.

Photonics.

Laser Technology, Photonics.

Pattern Recognition.

Spraying equipment.

Microelectromechanical systems industry

Project management.

Operating Procedures, Materials Treatment.

Piezoelectric semiconductors.

Micromachining.

Biomedical Engineering and Bioengineering.

Microelectronic pakaging.

Aeronautics.

Nanoscience.

Nanophysics.

Microwaves, RF Engineering and Optical Communications.

Microelectronics.

Parallel kinematic machines.

Machinery and Machine Elements.

Microstructure.

Applied Optics, Optoelectronics, Optical Devices.

Electronics and Microelectronics, Instrumentation.

Nanoelectromechanical systems.

Mechanical Engineering.

Control Engineering.

Artificial Intelligence (incl. Robotics)

Surfaces and Interfaces, Thin Films.

Industrial Chemistry/Chemical Engineering.

Control Structures and Microprogramming.

Industrial engineering.

Inertial navigation.

Manufacturing, Machines, Tools, Processes.

Reliability (Engineering)

Cyber-physical systems, IoT.

Materials Engineering.

Electronic apparatus and appliances.

Wireless communication systems

Intelligent control systems.

Engineering Fluid Dynamics.

Damping (Mechanics)

Vibration, Dynamical Systems, Control.

Optics, Optoelectronics, Plasmonics and Optical Devices.

Neural networks (Computer science)

Transducers.

Control.

Aerospace engineering

Aeronautics

Silicon

Special Purpose and Application-Based Systems.

Drops.

Computer-Aided Engineering (CAD, CAE) and Design.

Automotive Engineering.

Microactuators.

Accelerometers.

Metamaterials.

Microsystems and MEMS.

Structural Materials.

Microwave circuits.

Circuits and Systems.

Optical communications.

Physics, general.

Continuum Mechanics and Mechanics of Materials.

Power Electronics, Electrical Machines and Networks.

Materials Science, general.

Gyroscopes.

Atomic force microscopy.

Microtechnology.

Telecommunication

Biomedical materials.

Materials Science.

Measurement Science and Instrumentation.

Computational Intelligence.

Adaptive control systems.

Biomedical engineering.

Energy Harvesting.

Power electronics.

Very high speed integrated circuits.

Wave-particle duality.

Optoelectronic devices

Nanotechnology and Microengineering.

Resonators.

Feedback control systems.

Systems Theory, Control.

Adhesion.

Surfaces (Technology)

Microfluidic devices.

Automobiles

Autonomous vehicles.

Motor vehicles

Transportation.

Transportation Technology and Traffic Engineering.

Aerospace engineering.

Biomedical Devices and Instrumentation.

Aerospace Technology and Astronautics.

Control, Robotics, Automation.

Fluidic devices.

Engineering.

Energy Technology.

Electrical Engineering.

Turbomachines.

Physics.

Microelectronic packaging.

Optical and Electronic Materials.

Simulation and Modeling.

Computer Science.

Oscillators, Crystal.

Semiconductor films.

Biotechnology.

Computer System Implementation.

Polycrystals.

Characterization and Evaluation of Materials.

Innovation/Technology Management.

Airplanes

Biomedical Engineering/Biotechnology.

Electronic books.

Multibody Systems and Mechanical Vibrations.

Microfabrication.

Radio circuits.

Automation and Robotics.

Heat

Optical resonance.

Thin-film circuits.

Microelectromechanical systems

Electrodynamics.

Computer Applications.

Microfluidics

Metal oxide semiconductors, Complementary.

Electronic Circuits and Devices.

Industrial and Production Engineering.

Energy harvesting.