Microlithography.

Handbook of VLSI microlithography :principles, technology, and applications / by: (Language materials, printed)

Principles of lithography / by: (Language materials, printed)

Field guide to optical lithography / by: (Language materials, printed)

Resolution enhancement techniques in optical lithography / by: (Language materials, printed)

Microlithography/Molecular Imprinting / by: (Electronic resources)

Nanolithography and patterning techniques in microelectronics by: (Electronic resources)

Microstereolithography and other fabrication techniques for 3D MEMS / by: (Language materials, printed)

Materials and processes for next generation lithography by: (Electronic resources)

Molecular imprinting.

Chemistry.

Three-dimensional display systems.

Microlithography.

Organic Chemistry.

Nanotechnology.

Polymer Sciences

Photoresists.

Polymers.

Condensed Matter.

Physical Chemistry.

Integrated circuits

Microelectromechanical systems